Ultrasensitive H igh Sensitivity Dielectric F illed Lamé Mode Resonator for Chemical and Biological Applications
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چکیده
A BST R A C T This paper presents a mass sensitive biosensor utilizing a Lame' mode micromachined resonator. The mass sensitivity of the sensor has been investigated. A biosensor with Q value of more than 10,000 and mass sensitivity of -400Hz/ng, has been demonstrated at a resonant frequency of 37.8MHz. Frequency shift in response to additional mass is simulated in COMSOL. The obtained results show that the Lame' mode micromachined resonator has a potential to be used as an alternative to the QCM biosensors.
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تاریخ انتشار 2011